Used RUDOLPH AUTO EL #9225841 for sale

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RUDOLPH AUTO EL
Sold
Manufacturer
RUDOLPH
Model
AUTO EL
ID: 9225841
Wafer Size: 6"
Ellipsometer, 6".
RUDOLPH AUTO EL is an ellipsometer that measures the refractive index and thin film thickness of semiconductor and optical materials with exceptional accuracy and repeatability. The ellipsometer is designed for research laboratories, universities, and production facilities that require highly reliable and accurate results. Its intuitive software interface, high-resolution imaging, and automatic calibration make operation fast and simple. The ellipsometer is a variable angle spectroscopic ellipsometer for the measurement of the optical characteristics of thin films, with an integrated IR option for more demanding applications. It measures both s- and p-polarized spectra simultaneously in any combination of angles, giving evaluative thickness and optical constants. The patented variable angle variable wobble technology reduces imperfections due to angle instability and wobble, allowing for measurements of samples with multi-layered structures and high optical rotation. The ellipsometer can measure samples of any size or shape thanks to a customizable sample stage, and it features a 532 nm and optional 633 nm laser source for clean illumination of light reflecting samples. The foot pedal operated sample stage ensures the sample is only exposed when in the desired position, and a 5-inch touchscreen offers a generous, interactive platform for system control. Five different measurement modes, including intensity measurement, phase measurement, multi-angle measurement, single-point phase measurement and thickness measurement, give maximum flexibility. At the core of the ellipsometer is RUDOLPH MUSE analytic software. Combining spectral, overlay, and point-by-point data operations, MUSE generates accurate results for a wide range of thin film materials. It also features multilevel measurements to analyze complex structures, multi-angle data inspection to view sample information on a 2D or 3D parameter plane, and multi-color imaging to quickly identify small changes in film thickness. The ellipsometer provides highly reliable data that can be transferred to optical design software.
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