Used RUDOLPH AUTO EL #9296295 for sale

RUDOLPH AUTO EL
Manufacturer
RUDOLPH
Model
AUTO EL
ID: 9296295
Wafer Size: 6"
Ellipsometer, 6".
RUDOLPH AUTO EL is a state-of-the-art ellipsometer that provides high-precision measurements of thin-film layers on a variety of surfaces. RUDOLPH AUTOEL can accurately measure layer thicknesses from nearly any material such as dielectrics, inorganic materials, conductive materials, etc. This tool relies on optical ellipsometry, which is an optical technique for measuring the optical properties of materials. It is based on properties of light scattering upon reflection or transmission of a film material, providing a method for profiling the thickness and optical constants of a selected layer. AUTO EL provides advanced multiple-angle ellipsometry measurements with an adjustable angle of incidence of 45-90 degrees in 10 degree increments. This allows the user to collect optically calibrated spectra of the reflected intensities. The sample is illuminated by a single, low-power HeNe laser beam, which avoids electrical and thermal heating that can alter the optical properties of a sample. An in-plane rotation of the sample enhances the measurement of arbitrary thin film materials, so multiple angles of incidence can be considered for a more accurate analysis. There is also an absolute angle measurement option that eliminates any need for angle calibration. AUTOEL utilizes a liquid crystal light modulator to modify the incident angle and polarization, allowing easy angular scanning and polarization. The embedded software on RUDOLPH AUTO EL allows users to quickly adjust several opto-mechanical parameters, such as light flux, polarization, angle of incidence, and modulation frequency. It is capable of interpreting any input beam result in terms of optical properties and layer thicknesses. The data interpretation capabilities of this ellipsometer include a number of advanced algorithms to correct physical influences. RUDOLPH AUTOEL is a highly reliable and versatile tool for monitoring thin optical layers in the laboratory. It allows users to perform large-scale thin-film measurements with accurate and reproducible data, while providing a much wider range of available parameters to investigate. AUTO EL is an ideal tool for precision analysis of metal and dielectric thin-film layers, and their application for many areas such as semiconductor metrology, thin-film analysis, and optical material research.
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