Used RUDOLPH FE III #9165605 for sale
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ID: 9165605
Wafer Size: 6"
Vintage: 1994
Wafer thickness measurement system, 6"
1994 vintage.
RUDOLPH FE III is one of the most advanced and versatile ellipsometers available. This device's measurements are accomplished with spectral ellipsometry or variable angle spectroscopic ellipsometry (VASE). RUDOLPH FEIII offers fast and easy automated spectral ellipsometry, plus full flexibility in programming scan parameters. It measures in the mid infrared, near infrared and visible range of light. This device is suitable for monitoring thin film coatings and controlling chemical composition of materials.This device has built-in thickness, optical and chemical composition calculators. The powerful swing-arm design includes the sample and detector on an electrical arm that swings across a narrow acceptance angle. FE-III is a thermal-electrically cooled detector and delivers a dynamic range of >1000 units. FE III offers full flexibility in scan parameters such as angle coverage, angular resolution, wavelength range, baseline, and sample characteristics such as thickness, refractive index and/or extinction coefficient. The device can measure at different wavelengths, angles and polarization states as a function of the incident light intensity. FEIII is designed to operate in different laboratory configurations. It can be interfaced with various applications and other devices. This allows for the integrated operation of the ellipsometer with other instruments for advanced experiments. It can also be operated remotely through the internet from anywhere in the world. RUDOLPH FE-III has a long-term data storage capacity and is compatible with various software programs. These programs allow users to export data for immediate analysis and optimization. The data management system can be customized to fulfill the specific needs of the user. The high performance of RUDOLPH FE III's measurements are attributed to its cutting-edge optical system and excellent light source. It is equipped with an optimized focal length lens and an outstanding light source with a high stability and a wide wavelength range. RUDOLPH FEIII is a reliable and easy-to-use ellipsometer and can be used for high-precision and accurate measurement of a variety of materials. It provides reliable data for process control, as well as research applications. Furthermore, it is backed by a comprehensive warranty and customer service from the manufacturer, ensuring long-term satisfaction.
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