Used RUDOLPH FE IV #293830949 for sale
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ID: 293830949
Vintage: 1995
Thickness measurement system
Process capability: 0.11µm, 0.13 µm, 0.15 µm, 0.18 µm, 0.25 µm, 0.35 µm
Light source:
HeNe laser: 632.8 nm
Laser diode: 780 nm
Spot size:
Test site: 12x24 µm
De-skew: 125 µm
Site by site: 50 µm
Pattern recognition:
Optional pattern recognition
Edge / gray scale detection
Manual / auto de-skew
Reteach
Wafer handling:
3-Axis robot
(3) cassettes: 100 mm to 200 mm
Pre-aligner:
Virtual flat / notch finder
X, Y Centering: ±50 μm
Theta: ±0.1°
De-skew: ±5 µm
Stage:
Accuracy: 7 µm over 200 mm
Repeatability: ±1 µm
1995 vintage.
RUDOLPH FE IV is an elliptical polarizer, also known as an ellipsometer, which is a tool used for measuring the optical properties of a material. RUDOLPH FE-IV is an accurate and reliable ellipsometer that is used for a variety of measurements, such as film thickness, refractive indices, absorption and reflectance, surface roughness, dielectric constants and birefringence. It also offers a variety of scattering, spectroscopic and imaging capabilities to further extend its applications. The device is composed of three main components. The first is a monochromator, which selects a narrow band of light to interact with the sample. This spectrally-resolved light source is then reflected off the surface of the sample, and the partially refracted light is then passed through a Wollaston prism, which splits the beam into two components. They are then focused on a detector, where the intensity of each beam is recorded. From this data, the ellipsometer can determine the optical properties of the sample material. FE IV is applicable to a wide range of sample materials, from metals and semiconductors to glass and polymers. It features a modular design that allows for quick and easy setup, making it suitable for use in the lab or for field-based measurements. FE-IV is also equipped with automated sample scanning, enabling faster, more efficient measurements. RUDOLPH FE IV is capable of a wide range of measurements, from angle-distribution and topography to thickness, film properties and scattering. RUDOLPH FE-IV can also be used for imaging. Using a microscope and optical adapter, the instrument can be used for in-depth imaging and analysis of surfaces, including roughness and imperfections that cannot be seen with the naked eye. With its powerful imaging capabilities, FE IV can be used to gain a more detailed understanding of a material's optical properties. FE-IV's intuitive software platform makes it easy to configure and use. It can be used to monitor ongoing experiments, to collect data, and to interpret results. The software also allows users to customize parameters and settings to tailor their measurements to the application at hand. RUDOLPH FE IV is an advanced ellipsometer that is ideal for a variety of measurements and applications. With its powerful suite of optical and imaging capabilities, the instrument can help to quickly and accurately measure and analyze the optical properties of materials.
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