Used RUDOLPH FE VII #9097169 for sale

RUDOLPH FE VII
Manufacturer
RUDOLPH
Model
FE VII
ID: 9097169
Wafer Size: 6"
Vintage: 2000
System, 6", 2000 vintage.
RUDOLPH FE VII is an ellipsometer that provides an effective and cost-efficient solution for characterizing the optical properties of thin films. Unlike traditional ellipsometry systems, RUDOLPH FEVII does not require multiple light components, so it offers a more simplified and straightforward approach to optical metrology. The equipment also offers superior accuracy, with an error of less than 0.05°, due to its precise optical and mechanical design. This makes it ideal for applications such as film-thickness monitoring, determining refractive index, dielectric functions, and surface reactivity measurements. FE-VII is a single-source spectroscopic ellipsometer, which incorporates an interferometric light source and an area beam splitter. The interferometric light source allows the system to measure both spectral angles and intensities, producing highly accurate and repeatable measurements. The area beam splitter, on the other hand, enables the unit to measure both the s- and p-polarized light fields. This is made possible through the combination of a polarization-maintaining beam splitter and an adjustable analyzer. RUDOLPH FE-VII also features REFLEX OMS analysis and Quasi-Optics modules. The REFLEX OMS module allows users to acquire information about multi-layered thin film systems, such as optically anisotropic materials, inhomogeneous layers, and buried interfaces. Meanwhile, the Quasi-Optics module provides near-field oven measurements, which are useful for metrology fields such as 3D nanostructures. Physically, FE VII consists of an XYZ translation stage, a sample arm, a component bay, and an interferometer window. The XYZ translation stage allows for precise sample positioning and alignment, while the sample arm is used to mount and orient the sample. The component bay houses all of the enclosed equipment required for a full measurement setup, such as the REFLEX OMS and Quasi-Optics modules. Finally, the interferometer window provides direct access to the sample for accurate alignment. Overall, FEVII is an outstanding ellipsometer machine, providing superior accuracy and repeatability in a relatively straightforward and cost-effective package. It can be used for a variety of optical and material characterization applications, offering users the flexibility to tackle any projects they may face.
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