Used RUDOLPH S3000S #9122476 for sale
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ID: 9122476
Wafer Size: 12"
Vintage: 2010
Focused beam ellipsometer, 12"
Wavelength-stabilized diode laser
Magnification microscope
Visible reflecto meter
Windows operating system
SEMI-compliant E-95 software
RAID 1 mirror hard disk,
(1) GB RAM memory
3 GHz Dual Core MPU
Metrology module user interface
High resolution flat-panel display
Keyboard
Pointing device
Metrology module-end
EMO button
Automation features:
EFEM with high-speed Yaskawa dual-arm robot
Ultra-clean HEPA air filtering mini environment
Amber interior lighting in the EFEM
EMO to the right and left of the loadports
SEMI F47 compliant power-sag protection
Metrology optics and hardware options:
Wavelength stabilized 923nm DFB laser
Temperature controlled optics
Software Options:
Cognex patMax pattern recognition
FabConnect software: HSMS, GEM with trace data
Statistical data analysis, graphing and display software
Xport Automation platform options:
Ionizer kit for dual-loadport EFEM
Signal Tower (5-color: R, Y, G, B, Clear)
AdvanTag 9100 Carrier ID reader
E84 Controller required for TDK + Hokuyo
2010 vintage.
RUDOLPH S3000S is a versatile and user-friendly ellipsometer. Ellipsometers measure the change of polarization state of a light beam after reflection or transmission from a sample surface. This information can be used to measure the thickness of various thin films as well as determine the refractive index, extinction coefficient, and the surface morphology of a sample. RUDOLPH S 3000 S is an optical ellipsometer, which works by illuminating the sample surface with very low intensity, monochromatic polarized light, and measuring the change in polarization while the light is reflected back. This light is split into four channels before and after interaction with the sample. By comparing the simulated theoretical predictions with the measured polarization state, the film properties can be accurately determined. S3000S also includes the patented Fast Kinetics Utility, allowing multi-angle measurements on fast-changing film systems with only one measurement setup. S 3000 S is capable of simultaneous measurement of multiple film parameters including thickness, refractive index, optical anisotropy, absorption coefficient, and the surface morphology of the sample. It can confidently measure films as thin as a few angstroms and a wide range of sample sizes. RUDOLPH S3000S can accommodate samples with multiple layers of diffractive and refractive optical materials to achieve information on the entire structure. RUDOLPH S 3000 S utilizes a variable angle rotating polarizer and the PD-SQuaRe control and analysis module, allowing for independent adjustment of the angle and polarization. S3000S is also equipped with automated drift and background correction for faster, more reliable data collection and higher data accuracy. Additionally, S 3000 S supports both reflection and transmission ellipsometry, allowing for a wider range of applications compared to other comparable systems. RUDOLPH S3000S is a powerful, yet user-friendly tool designed to measure and analyze a wide variety of thin film samples. It is capable of providing the highest accuracy and precision of data with its proprietary optics, variable angle rotating polarizer, and integrated PD-SQuaRe control and analysis module. Regardless of sample size, thickness, or surface type, RUDOLPH S 3000 S allows for simultaneous measurement of various film parameters.
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