Used ADVANCED MODULAR SYSTEMS AMS 2000 #9299602 for sale

ADVANCED MODULAR SYSTEMS AMS 2000 is an advanced, modular etcher and asher equipment designed to provide maximum system flexibility and performance in a wide range of applications. The unit features high-precision, modular, multi-process support for etching, ashing, film exposure, and other applications. The modular design of AMS 2000 provides an optimized, efficient, and configurable machine and allows users to easily expand the capabilities of the tool as needed. The asset includes a standard dual-lane, multi-mode etcher and a modular base unit, along with an optional expansion chamber to increase the capacity of the model by up to 408 wafers. The high-precision etcher module offers precise etching of thin films with high precision and low defectivity, enabling users to achieve and maintain repeatability and accuracy. The etcher module features predictive and preventive maintenance to minimize process interruptions and prolong the life of critical components. The advanced modular asher module offers superior process accuracy and repeatability, and utilizes the latest technology to etch and clean post-fabrication wafers. The chamber features dual-nozzle design with gas injection tubes for accurate etching and cleaning of difficult-to-reach areas of the wafers. The asher provides process diagnostics functionality, allowing users to monitor and analyze the etching process to ensure that process parameters and requirements are met. The optional film exposure module utilizes light source technology to accurately and precisely expose positive, negative, and critical films of various sizes. The exposure module is designed to increase throughput while ensuring accuracy and repeatability. The maximum wafer size supported by ADVANCED MODULAR SYSTEMS AMS 2000 is 8 inches, and the interface and control equipment uses the Windows operating system for intuitive and user-friendly operation. The unit utilizes dual-lane processing to maximize throughput and reduce cycle times, ensuring maximum production efficiency and quality. With its modular design and advanced features, AMS 2000 etcher/asher is an ideal solution for a variety of semiconductor fabrication applications.