Used ADVANCED VACUUM Vision 320 #293764890 for sale

ID: 293764890
Wafer Size: 10"
Vintage: 2017
Reactive Ion Etchers (RIE), 10" Turbo pump No primary vacuum pump No chiller 2017 vintage.
ADVANCED VACUUM Vision 320 is a cutting-edge etcher and asher equipment that utilizes ADVANCED VACUUM technology to provide precise and efficient etching and ashing processes for various materials. Designed for research and industrial applications, Vision 320 offers a high level of control and versatility to meet the demands of diverse applications in fields such as semiconductor manufacturing, MEMS/NEMS fabrication, and materials science. ADVANCED VACUUM Vision 320 features a sophisticated vacuum chamber with high-performance pumping systems that create a low-pressure environment essential for achieving uniform and contamination-free etching and ashing processes. The system is equipped with a precise gas delivery unit that allows users to control the flow rates of various process gases with high accuracy, enabling the customization of etching and ashing recipes for specific materials and applications. One of the key features of Vision 320 is its advanced plasma generation machine, which utilizes a high-frequency power source to create a stable and uniform plasma discharge within the vacuum chamber. This plasma plays a critical role in the etching and ashing processes by facilitating the chemical reactions that remove material from the substrate surface or clean residues from the etching process. ADVANCED VACUUM Vision 320 offers a wide range of plasma sources, including inductively coupled plasma (ICP), capacitively coupled plasma (CCP), and microwave plasma sources, allowing users to choose the most suitable plasma configuration for their specific applications. These plasma sources can be easily integrated into the tool, offering flexibility and scalability for future upgrades or modifications. The asset features advanced process monitoring and control capabilities, including real-time monitoring of key process parameters such as chamber pressure, gas flow rates, plasma power, and substrate temperature. Users can visualize and analyze these parameters through an intuitive user interface, allowing them to optimize process conditions and ensure reproducibility and consistency in etching and ashing results. Vision 320 is equipped with a state-of-the-art substrate handling model that enables precise positioning and rotation of substrates during the etching and ashing processes. This equipment can accommodate a variety of substrate sizes and materials, making ADVANCED VACUUM Vision 320 suitable for a wide range of applications in research and production environments. In summary, Vision 320 is a highly advanced etcher and asher system that offers precision, control, and versatility for a variety of applications in semiconductor manufacturing, MEMS/NEMS fabrication, and materials science. With its ADVANCED VACUUM technology, plasma generation systems, process monitoring and control capabilities, and substrate handling unit, ADVANCED VACUUM Vision 320 is a powerful tool for researchers and engineers seeking to achieve precise and efficient etching and ashing processes.
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