Used ALCATEL / ADIXEN / PFEIFFER 601E #293743831 for sale
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ID: 293743831
Wafer Size: 4"
Deep Reactive Ion Etcher (DRIE), parts system, 4"
Pumps
(2) Load lock turbo pumps
2063 Pump
C2 Plus oil filter
Filling tube for liquid nitrogen
Gases: SF6, CF4F8, O2, CHF3, AR
Cooling type: Liquid nitrogen
Plasma and RF Generator
Temperature range: LN2.
ALCATEL / ADIXEN / PFEIFFER 601E is a professional grade etcher/asher used in a wide variety of cleanroom and industrial applications. It is designed to provide precise etching or ashing of a variety of substrates - such as metals, ceramics, and glasses - through a low-pressure vacuum equipment. ADIXEN 601E is constructed of top-of-the-line components, providing excellent durability and reliability for users. It works in combination with a separate power supply, which provides the energy needed for the AC/DC drive system. This unit shuts down ALCATEL 601E once it has reached the desired set temperature and vacuum level. The machine is highly configurable so that users can customize 601E to meet their specific application requirements. Different ways of setting up PFEIFFER 601E include manual parameter setting, work program setting, or parameter memory setting. The tool also provides a number of safety features, including a fan failure protection asset, a nozzle arc spark protection model, and a vacuum valve safety protection equipment. Additionally, ALCATEL / ADIXEN / PFEIFFER 601E contains a four-quadrant gate system and an inert gas purge unit to ensure operational safety. ADIXEN 601E is designed to prepare a wide variety of substrates in a fast and efficient manner. It can etch or ashe through the use of an adjustable voltage, current, and time setting, which results in a clean surface ready for further processing. The machine also offers an annealing function, which heats the substrate to a high temperature, then slowly cools it via a negative temperature coefficient (NTC). This feature is ideal for developing thick layers of material. ALCATEL 601E is also equipped with a number of intelligent features that can be monitored through its user-friendly control terminal. The tool allows users to save up to ten work programs, while also displaying real-time asset parameters such as chamber temperature, process pressure, and gas flow, as well as process parameters such as current, voltage, and cycle time. The model also contains a diagnostic equipment, which can be used to detect and diagnose any system issues that may arise. Overall, 601E provides a reliable and efficient etching or ashing processing unit, and it is a great choice for cleanroom and industrial operations. It is highly configurable and easy to use, offering users a wide range of features and parameters to customize their set-up and ensure a safe and efficient processing machine.
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