Used ALCATEL / ADIXEN / PFEIFFER 601E #293743831 for sale
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ID: 293743831
Wafer Size: 4"
Deep Reactive Ion Etcher (DRIE), parts system, 4"
Pumps
(2) Load lock turbo pumps
2063 Pump
C2 Plus oil filter
Filling tube for liquid nitrogen
Gases: SF6, CF4F8, O2, CHF3, AR
Cooling type: Liquid nitrogen
Plasma and RF Generator
Temperature range: LN2.
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