Used ALCATEL / ADIXEN / PFEIFFER 601E #9260027 for sale

ID: 9260027
Deep Reactive Ion Etcher (DRIE).
ALCATEL / ADIXEN / PFEIFFER 601E is an etcher/asher designed for applications requiring high throughput, repeatability and accuracy. It is an integrated equipment with a vacuum chamber, heating chamber, control panel, pumps and sensors. The etcher/asher is dependable and robust, making it ideal for industrial applications. ADIXEN 601E has a vacuum chamber with a capacity of 0.25 to 5 liters. It is equipped with an automated Self Tuning Protection System (STP) which monitors all pressure set points and process conditions when the etcher/asher triggers. This ensures process repeatability and accuracy. The chamber is heated to temperatures up to 1000°C and the walls are coated with hard polytetrafluoroethylene for protection against aggressive substances. ALCATEL 601E is equipped with a control panel that allows the user to program time, temperature, pressure, flow rate, mixture composition and other parameters. This allows the temperature of the chamber to be precisely adjusted to suit the individual application. The control panel also allows the user to remotely monitor and control the etcher/asher from any PC or device with a compatible interface. The etcher/asher also contains a number of pumps, including one turbo molecular pump, one liquid pump, and one liquid ring pump. These pumps ensure different process gases are kept flowing at the desired rate and pressure. The pumps have a high level of reliability and provide reliable performance for long periods. The etcher/asher is equipped with an array of sensors, including ones for pressure, temperature, vacuum, gas composition, and current. These sensors allow the etcher/asher to accurately monitor and control the process conditions in the chamber. The sensors can also be used to shut down the unit if any abnormal conditions occur. PFEIFFER 601E is a reliable and robust etcher/asher that is ideal for industrial applications that require precise process conditions and repeatability. Its integrated machine, automated tool control, and extensive array of sensors ensure accurate and repeatable results.
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