Used ALCATEL / ADIXEN / PFEIFFER 602E #9232742 for sale
URL successfully copied!
Tap to zoom
ID: 9232742
Wafer Size: 6"
Deep silicon etcher, 6"
Cassette vacuum load lock
Low pressure plasma source
Temperature controlled cryo chuck
Substrate holder: Θ150 mm
(2) Programmable Logic Controllers (PLC)
(2) Chamber etch systems
With handler
Process module:
Transfer chamber
Automated robotic arm
Computer interface system
(5) Sub assemblies:
Process chamber
Substrate holder
Plasma source
Power supplies
Pressure control
Transfer module:
Transfer chamber
Load lock chamber
Pressure control
Automatic loading and unloading substrates
With robotic arm, load lock and pumping package
System control module:
Real time process control and recipe management
RF Power control
Automatic substrate bias voltage control
Pump and valve control
Process gas flow control
Automatic batch processing
Manual control of all I/O signal.
ALCATEL / ADIXEN / PFEIFFER 602E Etcher / Asher is an advanced industrial tool used to create a high-precision pattern on the surface of a wide variety of materials. This tool is capable of producing high resolution results at very high speed. Its multiple configurations allow for both wet and dry etching, as well as topography, isotope and photoresist etching. The main features of ADIXEN 602E are its digital, high-resolution programming and control equipment, allowing for easy pattern adjustment, and its high degree of flexibility, enabling different etching processes and different applications. The digital, computerized system also includes an automatic calibration and auto-correction mechanism, ensuring consistent results over time. When it comes to effectiveness, ALCATEL 602E is designed to perform with an accuracy of up to 0.2 microns with a 45-degree chamfer. This high precision allows for the details of complex designs to be accurate and realistic. The power of the unit also ensures that the etching process is faster without sacrificing accuracy, producing a wide variety of patterns in a short amount of time. PFEIFFER 602E also offers multiple safety and environmental features. The machine is protected against water splashes, keeping the inside of the tool dry. It is also designed to minimize dust emission and noise, enabling it to be used even in an industrial setting. In addition, the asset comes complete with a user-friendly interface and software, allowing for easy operation of the model. 602E Etcher / Asher is an ideal tool for precision part marking, topography, patternation, etching/marking, and lithography. Due to its features, it can deliver accurate, high-resolution results regardless of the challenge it is tasked with. Highly configurable, the equipment offers flexibility in terms of pattern size, type of materials being worked on, complexity of patterns, and more. All of these features work together to give the user an optimized, highly efficient process, ensuring quick and accurate results.
There are no reviews yet