Used ALCATEL / ADIXEN / PFEIFFER AMS 200 SE #9251507 for sale

ALCATEL / ADIXEN / PFEIFFER AMS 200 SE is an etcher/asher process equipment designed to perform rapid high accuracy processing for both research & development and production semiconductor applications. It is the cryogenic plasma etcher and consists of a large vacuum chamber, a plasma source, an anodized wafer chuck and a substrate holder. ADIXEN AMS 200 SE is designed to handle both standard and special semiconductor applications at high accuracy and reliability. ALCATEL AMS 200 SE is equipped with a wafer chuck that is capable of reaching temperatures as low as -70°C. This ensures that the plasma processing is conducted at precise and homogeneous temperatures. The wafer chuck is also designed to reduce the cost of ownership by reducing the need for reticles, thus extending the life of the chuck. The substrate holder is equipped with automated floor loaders to allow for quick and easy loading of the substrate. PFEIFFER AMS 200 SE is also equipped with advanced Multi-zone ACC controller and ion gauge for precise control of substrate temperatures and power levels. AMS 200 SE operates in a cryogenic etch process to minimize the generation of thermal contamination while etching. It is also equipped with advanced plasma source control to ensure that the etching process is conducted with maximum efficiency and accuracy. The high accuracy is achieved through the use of precision etch mask, thick nitride blanket wafer substrate, and advanced smart sensor technologies. ALCATEL / ADIXEN / PFEIFFER AMS 200 SE offers high flexibility and versatility as it is capable of processing various substrate types and materials, encompassing the range from sputtered wafers to non-oxide substrates. The etch process can further be optimized for a variety of etch profile control with its six-axis beam scanning, programmable, and curve fitting functions. It also features a low etch rate time cycle for uniform and repeatable etching of wafers. Finally, ADIXEN AMS 200 SE provides a high level of safety with its advanced safety devices, such as an EMI filter, a temperature controller, a digital controller, and a multi-zone chamber security system. These safety devices enhance the reliability and accuracy of the process, to ensure that the high quality of the final product is achieved with a minimum level of risk. ALCATEL AMS 200 SE is an excellent choice for those looking for a reliable, accurate and safe etcher/asher process equipment.