Used ALCATEL / ADIXEN / PFEIFFER AMS 200 SE #9296962 for sale

ALCATEL / ADIXEN / PFEIFFER AMS 200 SE is an advanced etcher/asher for the semiconductor industry. It provides an integrated, cost-effective solution for dry etching applications in a wide range of process areas. ADIXEN AMS 200 SE etcher/asher is equipped with a fully programmable Horizontal Process Chamber (HPC) and a Lateral Wafer Sets Transfer (LWST). The HPC is designed to provide a range of process solutions including etching, ashing, pre-etching and ion implantation. The chamber also provides protection against conductive and corrosive materials. The LWST provides a precise, repeatable, low-pressure transfer of substrates and wafers between process chambers. ALCATEL AMS 200 SE also offers a range of process control features, including flexibility in recipes, variable temperature and gas flow rates, as well as overpressure control technologies and advanced safety features. The etcher/asher is also equipped with a RF plasma source, capable of providing repeated and uniform plasma across the substrate during etching or ashing processes. The uniformity of the plasma provides superior process control and accuracy. In addition, PFEIFFER AMS 200 SE features a dedicated abatement system for managing exhaust emissions. This system is based on a series of filtration steps to ensure purest process gas output available. AMS 200 SE provides a fast, reliable and repeatable alternative for etching and ashing substrates across multiple industries, such as semiconductor, electronic, medical, automotive and more. Its advanced safety features protect users, ensure process repeatability and quality, and maximize cost efficiency.