Used ALCATEL / ADIXEN / PFEIFFER AMS 200 #293757692 for sale

ID: 293757692
Etcher ESC Chuck, 6" Robot and controller Molecular pump and controller Butterfly valve and controller E-Chuck voltage controller Chamber RF Source and bias match Chiller Process and transfer dry pump chamber MFC Gases: N2, AR, O2, SF6, C4F8 T1/T2 Transformer: 110 V RF Source generator: 3 kW RF Bias generator: 500 W PC Monitor Keyboard Transformer: 380-208 AC, 3 Phase.
ALCATEL / ADIXEN / PFEIFFER AMS 200 is an etching or asher machine designed for the semiconductor and microelectronics industry. It is a powerful, user-friendly tool that provides a wide range of process capabilities for advanced technology production. ADIXEN AMS 200 is a highly automated equipment for etching, ashing, and passivating wafers. The system uses a combination of physical and chemical methods, such as reactive ion etching and infrared heating, to precisely etch the surface of a wafer. The unit is designed to be user-friendly and allows users to quickly set up processes and create repeatable recipes. ALCATEL AMS 200 features a large chamber that is designed to provide a uniform etching process. The highly efficient chamber construction ensures a homogenous etching process, even for large wafers. The machine also includes an advanced substrate support tool that ensures accurate wafer positioning and prevents contamination caused by handling. Additionally, the asset has a large variety of accessories, including a gas delivery model, an RF generator, an IR diode laser, and a mass flow controller, which can be used to optimize the process and achieve the best results. The equipment is equipped with a computer-controlled interface that allows users to easily program the various parameters of the process. Parameters such as gas flow rate, reaction temperature, and vacuum pressure can all be adjusted in order to optimize the etching process. The interface also provides alarm monitoring, and users can quickly diagnose any potential problems. PFEIFFER AMS 200 also features a variety of safety features. The system is designed to maintain low pressure in the reaction chamber, as well as to prevent accidental openings of the chamber by unauthorized personnel. Additionally, the unit is fully compliant with FDA and SEMI safety standards. Overall, AMS 200 is an advanced, user-friendly etching or ashing machine for the semiconductor and microelectronics industry. It is designed to provide high performance and consistently repeatable etching results, as well as a variety of safety features to ensure the safety of operators.
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