Used ALCATEL / ADIXEN / PFEIFFER AMS 200 #9229763 for sale

ALCATEL / ADIXEN / PFEIFFER AMS 200 is a high performance etcher/asher instrument designed for precise etching and ashing of samples. It is equipped with one integrated load-lock chamber and two reaction chambers which allow for two different processing cycles in parallel. The instrument is built with a temperature range of 300 to 700 °C, a pressure range of 10-2 to 100 mbar and a gas flow rate of 5 to 150 ml/min. ADIXEN AMS 200 is capable of etching with a variety of chemistries including reactive ion etching (RIE), dry etching and wet etching. In addition, the instrument offers several options for ashing including direct plasma and Thermal Immersion Ashing (TIA). The main advantages of ALCATEL AMS 200 are its precise control and high accuracy. The instrument has precise temperature and pressure control for both etching and ashing processes. It also has precise gas flow measurement and closed loop control to guarantee consistent results. Furthermore, the integrated load-lock chamber allows for precise sample handling and a quick exchange of samples during processing. For safety of the operator, AMS 200 is equipped with an integrated over pressure protection system. This system automatically shuts off the instrument when the pressure exceeds the limit set at the start of the process. This ensures the safety of the personnel and the sample. In conclusion, PFEIFFER AMS 200 is a high performance etcher/asher instrument designed for precise etching and ashing of samples. With precise control and high accuracy, the instrument offers a safe, reliable and efficient way to process the samples. It is an ideal choice for any application requiring precise etching and ashing.