Used ALCATEL / ADIXEN / PFEIFFER AMS 200 #9232795 for sale

ALCATEL / ADIXEN / PFEIFFER AMS 200 is a high-precision etching/ashing system designed to meet the needs of advanced wafer processing environments. It features a long-life triode-plasma electron source, allowing the system to perform controlled etching, annealing, and other processing functions. The process control is highly precise, enabling very fine patterning and excellent repeatability. The source is adjustable over a range of probabilities to achieve the desired result. The construction of the machine is robust and simple. It is primarily comprised of a vacuum chamber with a controlling door, a plasma source, and its relevant power supplies and control systems. The plasma source has an adjustable shutter mechanism which ensures a consistent and uniform etching/ashing process over the entire wafer. Air and nitrogen gas are applied to each wafer, without any heat radiation and without damaging it. The etching/ashing process can be adjusted to suit any given application and settings are easily translated between wafers. It maintains a very precise and repeatable processing rate through the whole wafer even with complex patterns. ADIXEN AMS 200 can run for longer periods due to its low operating temperatures in comparison to alternative systems. In addition, ALCATEL AMS 200 features a host of safety mechanisms. It has a sensor suite which monitors nitrogen gas regulation and sources, vacuum pressure, and internal temperatures. Notifications are sent to the user should any of these sub-systems exceed safe operating parameters. The machine also has an emergency shut-off option in case of any issue. PFEIFFER AMS 200 is a versatile system, capable of meeting a range of wafer processing requirements while ensuring safety and precision. It is an ideal solution for environments needing high-precision etching/ashing and fine-scale patterning capabilities.