Used ALCATEL / ADIXEN / PFEIFFER AMS 200 #9270002 for sale
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ID: 9270002
Vintage: 2006
Etcher
Missing parts:
Computer
Generator
Robot
2006 vintage.
ALCATEL / ADIXEN / PFEIFFER AMS 200 is an industrial grade etcher/asher designed to provide reliable performance in high volume applications. It is configured to meet a wide range of etching and ashing requirements, including both batch and continuous processes. A high frequency microwave generator powers the system, providing precise temperature control for the multiple heating zones in the chamber. This helps ensure that the etching or ashing process is uniform throughout the wafer or substrate to be processed. ADIXEN AMS 200 is designed to achieve optimal utilization of both time and energy. It offers two etching and ashing modes - automatic and manual. Automatic mode allows the user to specify the required parameters for the process and automatically adjust the process conditions based on the results of the previous process cycle. In manual mode, users can manually control the process conditions and intervals, allowing for easier tuning of process conditions. ALCATEL AMS 200 includes a real-time display to give visibility into the process results at any point, helping to minimize the risk of over-processing or under-processing. AMS 200 offers a robust design for long-term reliability and improved safety features. The chamber is made up of an inner raised ceramic platform with an outer stainless steel casing, providing a hermetic seal and excellent thermal performance. It is designed to handle a wide range of process chemicals and resists corrosion. The system is also designed with safety in mind, featuring built-in safety sensors and safety interlocks to ensure a safe operating environment. PFEIFFER AMS 200 can be configured with multiple optional accessories to suit specific applications. These include RF shielding liners, bubblers to enable reactive gas processing, and flushing systems to prevent particulate buildup. Overall, ALCATEL / ADIXEN / PFEIFFER AMS 200 is an industrial-level etcher/asher that is designed to provide reliable, consistent performance in high volume processes. It utilizes precise temperature control in the multiple heating zones of the chamber, and offers both automatic and manual modes to optimize the utilization of resources. ADIXEN AMS 200 also features robust construction and enhanced safety features to ensure safety of operation.
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