Used ALCATEL / ADIXEN / PFEIFFER AMS 4200 #9123425 for sale
It looks like this item has already been sold. Check similar products below or contact us and our experienced team will find it for you.
Tap to zoom
Sold
ID: 9123425
Vintage: 2008
Etcher
(1) Chamber
Process: Deep silicon bosch
SF6, C4F8, O2, Ar, N2, He, CHF3
Brooks platform
Dual loadlocks
Magnatron 7
ALCATEL ACT 600M TMP
User interface PC
Transfer PC
Process chamber: AMS X200
ALCATEL ACT 1300M TMP
Process gases:
SF6 1000sccm
C4F8 400sccm
O2 100sccm
O2 800sccm
Ar 200sccm
N2 1000sccm
Ar
CHF3
EDM
CS200-11729
200 / 208VAC, 3 Phase, 50/60Hz
ALCATEL AMS X200
(2) SEMCO HV52000C
SEREN L301 RF
Advanced energy dressler cesar RF
ENI Spectrum B-3013 RF
200/208VAC, 3 Phase, 50/60Hz
2008 vintage.
ALCATEL / ADIXEN / PFEIFFER AMS 4200 is a high-tech etcher / asher designed to meet the needs of large-scale industrial production. This precise and fully automated equipment ensures an accurate, repeatable process for etching and ashing sample and substrates. The system features an integrated high-vacuum filtration unit to ensure cleanliness during etching and ashing. This filtration machine removes the most common contaminants from the gas flow and helps prevent the contamination of the sample. Additionally, the automated process is designed to protect the operator from the harmful effects of exposure to chemicals. ADIXEN AMS 4200 uses advanced technology to ensure a high-quality etch / ash process. The built-in multi-zone temperature control technology ensures precise temperature control in both the processing chamber and gas flow. This offers both accurate and repeatable etch/ash results. In addition, the user-friendly graphical user interface (GUI) makes the tool easy to use. ALCATEL AMS 4200 provides a user-friendly and intuitive interface that provides a clear overview of all the parameters related to the etch/ash process. This asset is also equipped with a variety of safety features. For example, the built-in emergency-stop mechanism ensures that the process is immediately stopped in case any safety-related problems occur. Overall, PFEIFFER AMS 4200 is a top-of-the-line etcher/asher. Its precision, automation, and safety features make it an ideal choice for large-scale industrial production. Its user-friendly GUI and robust safety features make it both safe and easy to use, making it a go-to product for etching and ashing.
There are no reviews yet