Used ALCATEL / ADIXEN / PFEIFFER AMS 4200 #9280675 for sale

ALCATEL / ADIXEN / PFEIFFER AMS 4200 is an etcher/asher equipment for microelectronic device fabrication. It is designed to enable precise control of etch and ashing processes for a variety of semiconductor and/or micro-electronic device materials. The system offers enhanced process control through advanced diagnostics and the latest in etch/ash product offerings. ADIXEN AMS 4200 is a fully automated, modular etcher/asher unit composed of two essential components - the input display monitor and the etch/ash chamber. The display monitor consists of an 8.4" color touchscreen display with access to a range of adjustable parameters to ensure precise process capability. An intuitive graphical user interface provides easy navigation through various etch/ash options. The 8.4" touch screen display features 4-step guidance control, manual operation, a comprehensive menu of essential information and real-time dynamic operation monitoring. The etcher/asher chamber consists of two separately installable chambers, the etch chamber and ashing chamber, connected by a gas line. The etch chamber is composed of an AC feedback circuit which control a stepper motor to control varying quantities of process gas and etch time to create the desired etch/ash profiles. The ashing chamber comprises of ceramic material heater assembly, a pressure transducer and three quartz thermocouples. ALCATEL AMS 4200 also features cryogenic compatibility, to enable etching/ashing processes for temperature-sensitive materials. The machine can be operated in single or multiple wafer modes. AMS 4200 also offers user safety features, such as an emergency stop switch in the event of over temperature conditions, over pressure conditions and/or abnormal gas flow. PFEIFFER AMS 4200 has a temperature range of 0-1000°C and a process pressure range of 0.2-7.5 torr. The tool is equipped with a pressure chamber gas connection for sample conditioning and a manual vent tube connection. The materials of construction are stainless steel, aluminum, and Pyrex. ALCATEL / ADIXEN / PFEIFFER AMS 4200 offers a range of features, including process control accuracy, automated wafer loading and unloading, and compatibility for multiple process types. It is suitable for etching a variety of materials in semiconductor device fabrication, including Si, SiGe, and SiO2.