Used ALCATEL / ADIXEN / PFEIFFER AMS 601E #9232798 for sale

ALCATEL / ADIXEN / PFEIFFER AMS 601E is a state-of-the-art etcher / asher used for precision etching and ashing processes. This versatile machine is the ideal choice for high-throughput and high-quality microfabrication. With its large chamber, the 601E enables the etching of wafer up to 8" in size as well as a variety of substrates including silicon, glass, and polymer substrates. The 601E features advanced etching and ashing technology, including a 3D Plasma Source, integrated gas handling, and low-pressure differential pumping. The 3D Plasma Source in the 601E is capable of producing denser and more uniform plasma compared to a traditional flat-plate design. This technology enables increased process reproducibility and produces higher etching rates. The integrated Gas Handling system, on the other hand, provides precise control of process gases, enabling a more uniform plasma environment as well as enhanced process repeatability. The 601E is also equipped with a chamber-cooling system, which reduces the temperature of the process chamber during lengthy processes. This ensures that the substrates can be kept at an ideal temperature to optimize etching performance and precise control of end-point detection. Additionally, the low-pressure differential pumping system helps to maintain a formed plasma envelope during long ashing runs. ADIXEN AMS 601E is designed for the highest levels of etching and ashing precision. With its advanced technology, robust design and reliable performance, the 601E is the ideal choice for any etching or ashing application.