Used ALCATEL / ADIXEN / PFEIFFER GIR 300 #9386027 for sale

ID: 9386027
Dry etcher, parts machine Single loading tool With loading arm.
ALCATEL / ADIXEN / PFEIFFER GIR 300 is a high precision etcher/asher designed for the manual etching of silicon wafers and other materials. It is designed to enable users to process a variety of substrates, including substrates with electrical, photo, temperature, and environmental characteristics. ADIXEN GIR 300 offers a variety of features and options, allowing users to tailor the process to their exact needs. ALCATEL GIR 300 is a vertical etcher/asher, featuring a rotating platen assembly that enables the wafer to be moved during processing. This allows the substrate to be etched in different directions, allowing the user to maximize etch rate while maintaining precision. The platen is held in place by pneumatic cylinders, ensuring precision movement. GIR 300 is equipped with several unique control components that enable users to generate the high speed etch rates required for precision etching. This includes a servo-driven, four-axis positioning system, a linear drive, and a high-precision Piezo drive. These components can be used to adjust etch rates, etch depth, and the final layer thicknesses. The etcher/asher also features an integrated gas detector and manometer, which alert the user to any potential gas leaks and display the pressure inside the processing chamber. Additionally, an automated end of process control system monitors the etching process, alerting the user to any issues early on and preventing potential damage to the wafer. Safety is a priority with PFEIFFER GIR 300, and it is equipped with a variety of safety features that monitor and control pressure, vacuum, and temperature inside the processing chamber. An integrated interlock system prevents the door from opening during processing, and a safety valve shuts off the gas supply if any safety limits are exceeded. ALCATEL / ADIXEN / PFEIFFER GIR 300 is a versatile etcher/asher designed for precision etching of silicon wafers and other materials. Its powerful, high-precision drive components and integrated safety features ensure that the process is safe and accurate.
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