Used AMAT / APPLIED MATERIALS 0040-77771 #293596913 for sale

ID: 293596913
Polymide ESC, 195 mm.
AMAT / APPLIED MATERIALS 0040-77771 is a state of the art etcher or asher designed for low temperature dry etching and ashing to provide advanced pattern transfer processes with fantastic quality results. This high performance etcher offers the highest rate control parameter accuracy and precision control to enable critical process steps. It has been designed to provide the best quality substrates with extremely tight feature profile control and low defect density levels. This etcher is suitable for a wide variety of materials from polysilicon, silicon dioxide, polyimide, Al/Cu and Al/Si as well as silicon nitride. It provides a powerful wafer-level process that covers shallow etching, deep etching, deep reactive ion etching (DRIE), plasma etching, ion milling and ion beam etching. The etcher's unique advanced adjustments provide precise control of plume duration and duty cycles, enabling a variety of patterns, ranging from shallow features to very deep features and the capability to switch between etching and ashing processes. AMAT 0040-77771 can also provide higher quality results than traditional etching equipment due to its fuller ionization in the etching chamber and higher ion mobility in the etch gas. APPLIED MATERIALS 0040-77771 etcher is also constructed of highly reliable components with an adjustable vacuum chamber that offers excellent protection against contamination. It has an integrated water cooling system to ensure accurate temperature control and reliability, even during long runs. The heater is integrated into the system too, which helps to reduce thermal gradients. The etcher also has a detailed recipe control system that gives operators the capability to store, recall and edit process recipes for later use. This allows for quick and easy adjustments to parameters for various etching and ashing requirements, preventing any delays or wasted effort. This etcher is a great addition to modern etching and ashing machinery as it offers unmatched precision and control as well as a wide range of capabilities. 0040-77771 has been designed to provide a reliable, fast and quality solution for the cutting edge requirements of modern semiconductor manufacturing. It is an essential part of any contemporary process engineering lab that wants to make sure their patterns are transferred with the highest quality.
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