Used AMAT / APPLIED MATERIALS 0240-92696 #171999 for sale
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ID: 171999
Fiber optic trouble shooting kit for Applied Materials xR80 Ion Implanters
Specifications:
KD Optics PM-10 Power Meter
Wavelength: 660 nm
CE Marked: Yes
LS-10 LED Light Source Kit
Wavelength: 660 nm
CE Marked: Yes.
AMAT / APPLIED MATERIALS 0240-92696 is an etcher/asher platform designed for in chamber etching and ashing of various thin film materials. The etcher/asher has a fully automated equipment for sample loading/unloading and features a Windows-based HMI. It is equipped with two processing modules: a 5-pocket electro-polish module and a 6-pocket dry-etch module. Both modules feature dual process chamber design, which allows independent processes to occur in each chamber and allows processing of large substrates up to 18 inches in diameter. The etcher/asher system is capable of processing a wide variety of materials including metals, silicon, gallium arsenide, ceramics, and glass using a number of etching techniques including wet etching, plasma etching, and reactive ion etching (RIE). The wet etch module is equipped with heated baths for corrosive etching compounds, and separate rinse and vent systems for for clean and efficient processing. The plasma etching module utilizes radio frequency (RF) source power, enabling both directional and isotropic etching, with exceptional etching controllability. The RIE module achieves exact pattern etching with minimum debris by using a high-density plasma. AMAT 0240-92696 incorporates sophisticated monitoring and control features, allowing for precise and repeatable processes. For instance, the automated sampler enables the etcher/asher unit to constantly monitor temperature, pressure, and ICP RF power in both of its modules. It requires minimal operator involvement, with an intuitive graphical user interface to allow for smooth operation. The machine also includes an automated exhaust management tool, to ensure that all gases are properly vented from the tool, and an emergency shut-off switch for added protection. Overall, APPLIED MATERIALS 0240-92696 is an advanced etcher/asher platform that offers users a range of high-precision etching and ashing capabilities. Its integrated automation asset and monitoring controls ensure precise processes with minimal user involvement, and its wide array of etching techniques make it suitable for use in a variety of applications.
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