Used AMAT / APPLIED MATERIALS 5200 #170744 for sale

AMAT / APPLIED MATERIALS 5200 is an advanced etch/ash equipment (etcher/asher) designed to provide reliable, high quality etches, ashers and other process performance on next-generation materials. The system is composed of a process chamber and a linear motion/translation assembly to facilitate precision etch/ash of substrates. AMAT 5200 works by introducing a gas or vapor into the process chamber and subjecting the chamber's contents to various flow control and process control parameters. This combination of advanced control and process features offers users with a robust and reliable unit which can accommodate a wide variety of substrates with the highest quality of etch or ash results. The basic model of APPLIED MATERIALS 5200 comes with a process chamber of 25.4 cm x 25.4 cm (10" x 10") that can accommodate up to 5000 W of forward and reverse power for an etch/ash configuration. This enables users to run up to 30 W for each process or asher configuration, offering greater versatility and choice. 5200 allows for temperatures of up to 1000 °C, humidification capability and gas flow management. AMAT / APPLIED MATERIALS 5200 has the latest in chamber shielding technology to isolate users from any harmful byproducts of the etch or ash process. The shielding material used is eddy current-shielded construction to ensure protection from unwanted emissions. AMAT 5200 offers an accurate drive machine designed to keep process conditions repeatable over time. This is made possible by the linear motion assembly which is powered by a patented synchronous eddy current motor to ensure the accuracy and repeatability of the etch/ash process. APPLIED MATERIALS 5200 also includes optional controls, such as thickness monitoring and end-point detection, to allow users to monitor the process in real-time. 5200 has a multi-cell process monitoring tool which can be used to monitor each step of the etch/ash process in order to improve process repeatability. Finally, AMAT / APPLIED MATERIALS 5200 has full integration capabilities which allow users to leverage other processes or equipment within their facility. This enables users to easily transition their existing etch/ash recipes to AMAT 5200. All in all, APPLIED MATERIALS 5200 offers the latest in high quality etch/ash capabilities for a wide variety of substrates. Featuring an advanced process chamber, shielding materials, accurate drive asset, data monitoring and integration capabilities, 5200 is the ideal solution for users looking for next-generation etch/ash performance.