Used AMAT / APPLIED MATERIALS 8110 #293652765 for sale

AMAT / APPLIED MATERIALS 8110 etcher / asher is a versatile, high-performance tool for etching and patterning a wide range of substrates including silicon, quartz, and other dielectrics. It is designed for quick and efficient material removal to create device features on the micron to sub-micron scale. This tool is capable of controlling etched depth and width with accuracy of better than 10 Angstroms using reactive ion etching (RIE) process. AMAT 8110 features a closed-collar processing chamber to ensure uniformity and is equipped with automated parallel inductively coupled plasma (iCP) sources that enable high aspect ratio and step coverage. Automated wafer handling technology delivers consistent, repeatable results for high-volume production. The etcher / asher is designed to handle batches of up to twenty-four 6-inch (150 mm) wafers for high throughput and maximum productivity. This tool is designed for compatibility with a wide range of etchant gases including chlorine (Cl2), fluorocarbons (CF4 and CHF3), oxygen (O2), and nitrogen trifluoride (NF3). The use of high purity etching gases and a closed-collar processing chamber leads to improved etching uniformity, ultimate throughput and repeatability. In addition, the etcher / asher can be equipped with a quartz crystal monitor (QCM) to monitor the etching process directly in situ. APPLIED MATERIALS 8110 etcher / asher includes an integrated compressor and vacuum equipment, as well as a closed-loop cooling system, delivering an optimized plasma environment. An onboard user interface provides intuitive control, monitoring and recording of various process parameters, including temperature and pressure. This tool also supports real-time monitoring of several process variables, enabling process optimization and maintenance of process consistency for high yields. To address issues related to process repeatability, this tool utilizes a proprietary char rate analysis unit with pattern recognition to ensure consistent etching results from wafer to wafer. 8110 also offers the option of a precision automated wafer aligner machine for step coverage and high aspect ratio structures. As part of its standard equipment, AMAT / APPLIED MATERIALS 8110 is also equipped with programmable feedback loop control, which enables probe testing for improved process control for yield results. AMAT 8110 etcher / asher is designed to help manufacturers with their production output and quality. Its versatile design, high throughput, and robust hardware enable rapid and efficient production with repeatable performance and maximum yields. This tool is an essential tool for semiconductor manufacturers, achieving the highest scaling and device precision.