Used AMAT / APPLIED MATERIALS 8115 #9196362 for sale

AMAT / APPLIED MATERIALS 8115 is an etch/ash equipment that provides high-speed etching and ashing for critical device layers in many advanced material deposition and etching processes. AMAT 8115 provides superior process performance for critical applications in silicon wafer semiconductor processing. This system offers precision etching and ashing for multiple materials, including silicon, silicon dioxide, polysilicon, nitride and metals. This unit is powered by an advanced software package with an integrated memory network and processor, which enable users to get the best performance, productivity and cost efficiency. APPLIED MATERIALS 8115 includes two independent and automated process sources, designed to provide the highest yields of processes. Users are able to optimize their processes with the most up-to-date techniques, and 8115 will run separate recipes for etch and ash processes simultaneously. AMAT / APPLIED MATERIALS 8115 features a fully automated RF source, low-park data collection, and Wafer Configuration Map selections, which allow users to select process targets for the individual wafers. This allows for improved process uniformity and has improved cycle time. AMAT 8115 has a built-in optical machine to observe the wafer surface for real-time process monitoring and diagnostics. This allows for process optimization, maintenance, and yield improvement. APPLIED MATERIALS 8115 is capable of supporting a wide range of recipe parameters, which include efficient gas delivery, power, temperature, pressure and chamber control. It also provides an exacting combination of high-speed etching, efficient cooling and rapid removal of process residues. This helps maintain the tight heating, cooling, and etching requirements of highly advanced process. In addition, 8115 is built on an open architecture platform, so it's easily integrated with other AMAT equipment and software modules. With its extensive feature set, users can perform numerous etch and ash applications with ease. AMAT / APPLIED MATERIALS 8115 is a compact and powerful tool, perfect for substrate processing of many advanced materials.