Used AMAT / APPLIED MATERIALS 8116 #9226746 for sale

AMAT / APPLIED MATERIALS 8116
ID: 9226746
Wafer Size: 6"
Vintage: 1993
Oxide etcher, 6" 1993 vintage.
AMAT / APPLIED MATERIALS 8116 is a high-performance etcher/asher equipment used in semiconductor processing. The system is especially designed for precise, precise and highly precise deposition and etching of thin films. It is intended for production process in cleanroom environments and is suitable for a wide variety of semiconductor materials and applications. AMAT 8116 features a single-wafer loading unit, allowing for rapid and reliable throughput. Its open-frame platform design enables high-performance vacuum operation. The machine also features extended operating pressures, high control accuracy, and temperature uniformity. APPLIED MATERIALS 8116's independent temperature control tool allows for precise heat control throughout the entire deposition or etch process. The asset is capable of high-precision Asher/Etcher deposition process, both wide-area and multi-spot, and can perform through-mask and through-oxide depositions. The Asher/Etcher can be used for dry etching process and is used mainly for the formation of trench structures in semiconductor devices. All of the deposition and etching process parameters are set through a user-friendly graphical interface on the touchscreen. Reliability is ensured by the Plug and Play concept and high accuracy of temperature control. The model is designed for operating in 24/7 production mode, with a fully integrated intelligent equipment capability. The software allows for automated process sequence control and monitor techniques. 8116 features advanced safety enhancements, including an acid-based safety management system. The safety unit consists bath-water temperature and pH monitoring, alarm systems and appropriately rated protective fume hoods. The machine is also equipped with a 50 + parts integrity monitoring tool, ensuring no flawed parts re-enter the etching unit and are sent to the customer. AMAT / APPLIED MATERIALS 8116 is a high-performance, flexible etching and deposition asset that provides unbeatable deposition accuracy, uniformity and repeatability. With its one-of-a-kind extended operating pressures, temperature control and safety systems, AMAT 8116 is the perfect solution for a wide range of semiconductor applications.
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