Used AMAT / APPLIED MATERIALS 8300 #293610283 for sale
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AMAT / APPLIED MATERIALS 8300 is a multi-function etcher and asher equipment designed for complex patterning of semiconductor substrates. This system combines deep reactive ion etching (DRIE) and plasma ashing in a single unit, allowing for rapid patterning of high-performance devices. AMAT 8300 is built to process substrates up to 8" wafer size, with a scalable process window to accommodate a variety of substrates and process parameters. For etching, the machine uses an advanced inductively-coupled plasma (ICP) source embedded in a lightweight, fiberglass body to deliver high etch rate throughput. This ICP source is designed with a range of adjustable parameters for low-cost production. Ashing is done by introducing an oxygen-containing gas, such as O2 or O3, into the reaction chamber, then activating the gas with an external plasma source. This plasma ashing allows for controlled deposition and/or removal of materials in a non-contact manner. The tool is designed for high reliability and repeatability, with automated process recipes that allow for fine-tuning of the process parameters to meet the highest specifications. With a long working lifetime and high-precision, APPLIED MATERIALS 8300 is ideal for the manufacture of a wide range of devices, including digital, analog, and high-speed memory parts. 8300 comes with an onboard microcomputer, allowing for remote monitoring and control, while the large viewing window enables easy viewing of the internal process chamber. To ensure precision and quality, AMAT / APPLIED MATERIALS 8300 comes with dedicated process control and metrology systems, with an auto-adjustment of etch parameters as part of the process. Finally, AMAT 8300 comes with a comprehensive safety package. The QSX software suite allows for automated monitoring of process parameters and potential failure points, alerting to any potential issues before they arise. Safety features such as a lock on the reaction chamber and a fire suppression asset ensure that the model is compliant with all safety regulations and protocols. Overall, APPLIED MATERIALS 8300 is a powerful and reliable etching and ashing equipment designed for optimum productivity and quality.
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