Used AMAT / APPLIED MATERIALS 8310 #9365710 for sale

AMAT / APPLIED MATERIALS 8310 (AMAT 8310) is an automated plasma etcher / asher, designed for high throughput and precise etching / ashing of patterned substrates. The equipment is capable of etching / ashing over a wide range of materials such as SiO2, SiN, Si3N4, polyimide, metals, nitride, and other materials. The system comes equipped with adjustable dual electron beam guns, an integrated vision unit, and a multi-station robotic handling machine. APPLIED MATERIALS 8310 is composed of a vacuum chamber, isolation chamber, and a dual electron beam gun. The vacuum chamber provides a uniform plasma environment that is necessary for precise pattern etching / ashing. The isolation chamber allows gases to be injected into the process chamber in an inert atmosphere and ultra-violet radiation to be blocked from the process area reducing contamination. The dual electron beam gun is the most important part of the etcher / asher. Electron beams provide the energy necessary for the precision activation of the plasma. This allows high throughput of the etching / ashing process. The dual gun technique helps eliminate the need to reposition substrates in cases where multiple etch levels are required, thus decreasing the total time for etching / ashing. 8310 is equipped with an integrated vision tool for alignment, spot inspection, and pattern recognition. This ensures that patterns are precisely aligned and that substrates meet manufacturer's specifications. Furthermore, a multi-station robotic handling asset is utilized to provide additional substrate handling flexibility. This helps decrease the number of manual interventions, which can significantly improve throughput. Finally, designed for high volume production, AMAT / APPLIED MATERIALS 8310 has an expansive database that allows users to store their recipes for a particular material etching / ashing process. The model also offers three different operation modes: manual, semi-automatic, and automatic - each of which supplies the best performance and stability for use in various applications. In short, AMAT 8310 provides an automated, high throughput, precise etching / ashing equipment that is capable of etching / ashing a wide range of materials with an integrated vision system and multi-station robotic handling unit, plus adjustable dual electron beam guns for high precision.