Used AMAT / APPLIED MATERIALS 8310A #9356368 for sale
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ID: 9356368
Oxide etcher
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Chamber: AMAT / APPLIED MATERIALS 0010-00172 Pre-reactor.
AMAT / APPLIED MATERIALS 8310A is an etcher/asher equipment comprising a vacuum chamber providing the environment necessary for ashing and etching wet and dry processes. AMAT 8310A's unique, modular architecture allows for rapid exchange of components and flexibility in maintaining the vacuum. Its power ratings and high-capacity, integrated-source technologies enable an ashing and etching process that is fast, efficient, and repeatable. The heavy-duty vacuum system safely ashes, etches, and dry cleans with heat or radio-frequency energy sources, ensuring operator safety while optimizing material removal. APPLIED MATERIALS 8310A is equipped with AMAT ED3 control unit, which allows for tight control of ashing/etching processes and management of the vacuum machine. Its independently tested and certified closures, environmental seals, and proven process management ensure a reliable and consistent process. Additionally, advanced leak testing and vacuum stability detection ensure the safety of the tool and its components. 8310A is tailored for a wide range of ashing and etching processes, including wet and dry etching. Dry etching processes, such as plasma etching, involve generating heat or radio-frequency energy to remove materials in the most delicate fashion. AMAT / APPLIED MATERIALS 8310A offers automated control of process parameters, such as pressure, temperature, gas flow, and gas composition, enabling rapid set up and optimization of ashing and etching recipes. An advanced remote-control asset provides secure control over the data and operation of the etcher/asher, with the option to remotely diagnostic errors and access media archives. It also offers flexible configuration and process monitoring, with a built-in vibration detection model that allows for real-time monitoring of process conditions. In addition to the myriad of technologies that enhance and automate the etching and ashing process, AMAT 8310A also offers a number of efficiency enhancing features, such as reduced cycle time and increased productivity. Its modular architecture provides the maximum amount of room for process control, with access to a variety of chambers and multiple sources of energy. This makes the equipment capable of efficiently ashing, etching, and dry cleaning a wide range of materials and substrates. APPLIED MATERIALS 8310A is ideal for industries that require fast, efficient, and repeatable etching and ashing processes.
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