Used AMAT / APPLIED MATERIALS 8330 #293762395 for sale
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ID: 293762395
Wafer Size: 6"
Vintage: 2005
Etcher, 6"
Non-functional
Materials: Al, Mo, Ta, Ti, and indium tin oxide
Bell jar dome included
2005 vintage.
AMAT / APPLIED MATERIALS 8330 is a highly advanced and sophisticated etcher/asher used in the semiconductor industry for precision processing of silicon wafers. This tool is designed to etch and clean wafers at the nanoscale level to achieve high levels of accuracy and consistency in semiconductor device manufacturing. AMAT 8330 is equipped with state-of-the-art technology and features that make it a versatile and reliable tool for a wide range of etching and ashing applications. It is known for its high throughput, excellent process uniformity, and superior control over parameters such as etch rate, selectivity, and profile control. One of the key components of APPLIED MATERIALS 8330 is the process chamber, which is designed to provide a controlled environment for etching and ashing processes. The chamber is constructed from high-quality materials that are resistant to corrosive chemicals and high temperatures, ensuring reliable performance and long-term durability. The chamber is equipped with advanced heating and cooling systems to maintain a consistent temperature during processing, as well as gas delivery systems for precise control of process gases. 8330 features a sophisticated plasma generation equipment that is essential for the etching and ashing processes. The plasma is generated by applying radiofrequency (RF) power to a gas mixture within the chamber, leading to the formation of reactive ions and radicals that interact with the wafer surface to remove material selectively. The RF power can be adjusted to control the density and energy of the plasma, allowing for precise tuning of the etch rate and selectivity. The tool is also equipped with a comprehensive gas delivery system that allows for the precise control of process gases such as fluorine-based etchants and oxygen-based ashing gases. The gas delivery unit ensures a consistent and uniform distribution of gases across the wafer surface, resulting in high process uniformity and reproducibility. AMAT / APPLIED MATERIALS 8330 is operated through an advanced control machine that allows for real-time monitoring and adjustment of process parameters. The tool features a user-friendly interface that enables operators to set up and optimize process recipes quickly and easily. Process data can be logged and analyzed to ensure process stability and quality control. In summary, AMAT 8330 is a cutting-edge etcher/asher tool that offers high performance, reliability, and versatility for semiconductor manufacturing applications. Its advanced technology, precision control systems, and robust design make it an essential tool for achieving high-quality and high-yield semiconductor devices.
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