Used AMAT / APPLIED MATERIALS AME 8100 #9178965 for sale

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ID: 9178965
Wafer Size: 4"
Plasma etcher,4" Autoloader (6) Wafer holders.
AMAT / APPLIED MATERIALS AME 8100 is an Asher/Etcher, designed to reliably and accurately remove material from the surface of a substrate. The equipment utilizes a wide variety of etching gases such as hydrogen bromide, hydrogen chloride, and SF6 in the etching process. It integrates state-of-the-art Endura hardware and software for critical temperature, pressure and gas composition control of the etching process. The system is able to process a variety of materials such as silicon, gallium arsenide, and silicon oxide in wafer substrates up to 8" diameter. AMAT AME 8100 offers precise control of process parameters to deliver desired etch rates and uniformity. Utilizing real-time process monitoring, the unit maintains repeatable temperature control, and uniform exposure of the substrate to the etching gases. It features controllable diffuse and remote etch configurations to ensure complete coverage of the device geometry. In addition to the process control, the machine also offers flexible substrate loading options and innovative single- and double-sided etchbatch loading capabilities. APPLIED MATERIALS AME 8100 delivers superior process uniformity, with high throughput and low particle generation. For specialty etching requirements, the tool offers precision mask coding capability and a variety of specialty etch process gases. The asset also integrates additional features such as process execution logging, process traceability, and automated recipe management for optimizing etch processes. In conclusion, AME 8100 is a reliable and accurate etcher/asher designed to process a variety of materials. It features advanced temperature, pressure and gas composition control, real-time process monitoring, specialized process gases, and additional features such as process execution logging and traceability. With superior process uniformity, and low particle generation, AMAT / APPLIED MATERIALS AME 8100 is sure to meet all of your etching needs.
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