Used AMAT / APPLIED MATERIALS AME8111 #9148207 for sale

AMAT / APPLIED MATERIALS AME8111 is a precision etcher/asher used in semiconductor manufacturing and research processes. It is the most advanced etcher/asher available in its class, offering an accurate, repeatable etch process with superior uniformity. The etch chamber is configured with a single vertical wall mount design, providing a maximum etch throughput and substrate size of 8" x 8". The uniformity of the etch process is enhanced with an integrated high-density plasma generator capable of generating high-density plasma conditions with a minimum of 1.5 torr of plasma pressure. AMAT AME8111's advanced chemical delivery system is capable of utilizing one to four gases for etching a variety of materials. This makes it a highly flexible tool for different etching applications, such as shallow trench isolation, contact cutback, or contact etchback in MOSFET or ultra shallow junction devices. It also includes a boosted bias etch capability, and lateral bias power compensation to aid in critical etch depth control. APPLIED MATERIALS AME8111 is equipped with AMAT patented Power Monitor circuitry, which ensures precise control of process parameters. It also has the ability to store up to 50 process recipes, giving the operator the flexibility to switch between process recipes quickly and accurately. The operator interface is easy to navigate with an intuitive graphical user interface. AME8111 is an ideal tool for etching a variety of substrates, including metals and silicas such as quartz substrates. It is coated with an inert etch-resistant fluoropolymer, making it highly resistant to corrosive etch chemicals. Its innovative radial ion injection geometry reduces the negative effects of surface charging on samples, resulting in more uniform etching. Additionally, its high-throughput and precise results make AMAT / APPLIED MATERIALS AME8111 an excellent choice for research applications. AMAT AME8111 also has an optional clean station for cleaning substrates before etching. Overall, APPLIED MATERIALS AME8111 etch/asher is a reliable and versatile tool for a wide range of semiconductor processes. Its accurate and repeatable etching process, flexible chemical delivery system, and intuitive user interface make it a highly productive and reliable unit. The high etch rate, uniformity, and specialized features make it the ideal tool for etching sensitive structures such as ultra-shallow junctions with minimal damage.