Used AMAT / APPLIED MATERIALS Centris G5 Mesa #293627633 for sale
URL successfully copied!
Tap to zoom
ID: 293627633
Wafer Size: 12"
Vintage: 2015
Etcher, 12"
Process: Poly etch
(6) Chambers
(4) Load ports
Gases: Cl2, HBr, CHF3, SiCl4, CH4, O2, N2, Ar, He, CF4
Does not include Hard Disk Drive (HDD)
2015 vintage.
AMAT / APPLIED MATERIALS Centris G5 Mesa etcher/asher is an advanced equipment designed for etching and ashing a range of various materials including silicon, metals, and polymers. The Centris G5 is one of the most advanced etcher/asher systems on the market, capable of precise etching, ashing, and patterning with a wide range of materials. The system features a self-contained, all-in-one platform with an automated, modular design, allowing for the direct integration of components and instruments, including Veeco etcher chambers, Varian/RHT vacuum drawers, and a heater head. The Centris G5 has a variety of integrated process chambers, each designed to process a different material type and achieve specific process requirements. The focused ion beam etches and ashers are capable of producing precise holes and trenches, which are defined by the user-defined substrates. Materials processed range from silicon, metals, and polymers to photomask designs and non-conforming pattern design. The Centris G5 also has a multi-frequency microwave generator, allowing for high frequency etching with larger definition and broader aspect ratio range. The large-area wafer processing allows for greater volume throughput, enabling the processing of up to four substrates of various sizes in one etch cycle. The Centris G5 unit is also equipped with features that increase yields and reduce cycle times, including the TruClean automated cleaning function to ensure substrate integrity and cleanliness. In addition, the machine utilizes high-uniformity plasma cleaning with consistent gas flows for faster etching cycles. The Centris G5 is designed for high throughput, yielding a cycle time that is 20-30% faster than the market average. The tool offers up to 100 watts peak etching power, enabling high-precision, large-area processing while maintaining tight tolerances and accurate etch placement. Utilizing high-level automation, precision control, and advanced asset capabilities, AMAT Centris G5 Mesa is the ideal tool for etching and ashing a wide range of materials. The automated, modular design increases throughput while offering the flexibility and capability of processing varying substrate sizes with high accuracy. The highly integrated model also provides increased yield, cleanliness, and cycle time, making it the ideal tool for any process-intensive etcher/asher application.
There are no reviews yet