Used AMAT / APPLIED MATERIALS Centris G5 Mesa #293627635 for sale
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ID: 293627635
Wafer Size: 12"
Vintage: 2014
Etcher, 12"
Process: Poly etch
(6) Chambers
(4) Load ports
Gases: Cl2, HBr, CHF3, SiCl4, CH4, O2, N2, Ar, He, CF4
Does not include Hard Disk Drive (HDD)
2014 vintage.
AMAT / APPLIED MATERIALS Centris G5 Mesa is an Etch/Asher equipment used for rapid and precise pattern transfer of materials in semiconductor device applications. It is a batch process-type system designed with both etch and ash process modules. The unit offers advanced, multi-step etch/anders processes in a highly reliable, cost-effective package. AMAT G5 features dual-chamber technology, enabling both etch and ash processes in the same machine. The integrated process power supply uses a unique "High Current High Power" (HCHP) switch configuration, which allows it to supply up to 50A in a single power supply, enabling efficient, repeatable etch and ash processes. Furthermore, the tool comes with an optional in-situ O2 pretreatment module, which can be added to significantly speed up process setup times. APPLIED MATERIALS G5 is capable of achieving extremely precise, repeatable etch and ash processes due to its advanced two-line beam masking asset, high-resolution shutter control, and active substrate temperature control. It has a robust temperature management model that offers from -40 to 200 °C temperature range and stabilizes at 1⁰C setpoint accuracy. In addition, fine process control is made possible with its ability to activate and deactivate nitrogen flow at the sub-millisecond level. AMAT / APPLIED MATERIALS G5 etch and ash equipment also has a large process area, with up to 500 mm wafer area. It supports up to 25 wafers at once, increasing throughput and enabling quick, efficient processing of batches. Furthermore, with its in-chamber diagnostics feature, the system enables monitoring of chamber conditions in real time in order to detect early failure and alarms. Safety is assured with this unit through a wide range of sensors. AMAT G5 Mesa is an innovative etch/ash machine engineered specifically for the semiconductor device industry. Its robust reliability, productivity, process control, and safety features make it an ideal choice for a wide range of etch and ash applications.
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