Used AMAT / APPLIED MATERIALS Centris #293596832 for sale
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ID: 293596832
Wafer Size: 12"
Vintage: 2015
SYM3 Etcher, 12"
Controller
(2) Racks
Main AC
System controller
Power supplies
(6) Chambers:
Chamber A1
Chamber A2
Chamber B1
Chamber B2
Chamber C1
Chamber C2
2015 vintage.
AMAT / APPLIED MATERIALS / AKT Centris is a type of etcher/asher designed to create patterns and structures on a variety of materials, including metals, semiconductors, and plastics. This is done using a combination of lithography, dry etching, wet etching, and CVD technology. AKT Centris equipment was designed to be robust and reliable, allowing operators to achieve high levels of process consistency. It features a large, easily accessible chamber that is capable of handling large objects. The chamber is equipped with powerful RF and DC electrodes, along with a large vacuum system. The included software allows operators to easily adjust chamber parameters, as well as monitor etching process parameters in real-time. The unit uses two etching techniques, RIE (reactive ion etching) and ICP (Inductively Coupled Plasma). RIE is a Plasma based etching approach that uses a high-energy particle bombardment to etch the material. Whereas ICP is a Plasma based etching technique that uses an electromagnetic field to control the ionization process. AMAT Centris is able to etch several materials at once, allowing for quick and efficient operation. It has a high etch rate, and can work with feature sizes of up to three microns. It also has optional equipment such as a waveguide heating machine and gas mixing capabilities, which make it suitable for a range of applications. The tool has proven itself in numerous industries, ranging from academic research labs to large industrial production lines. Its versatility and dependability have made it a popular choice among many etching requirements. The high levels of automation make it even easier to use, reducing the amount of operator-related errors and ensuring a high degree of repeatability. Overall, APPLIED MATERIALS Centris is a reliable and efficient etcher/asher, capable of meeting the needs of many different industries. Its robust design and errant of features make it a great choice for production, research, and other etching applications.
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