Used AMAT / APPLIED MATERIALS Centura AP DPS #9296966 for sale

AMAT / APPLIED MATERIALS Centura AP DPS is a fully automated etcher/asher equipment designed to produce ultra-clean and precise features at competitive speeds. An advanced reticle system allows multiple etch recipes to be programmed and executed effortlessly, while the dual process chamber design allows for back-to-back processes in one etching step. Utilizing a Powerful Plasma with High Pressure RIE capability, AMAT Centura AP DPS is capable of producing high-aspect ratio features with minimal chargeback effect and precise sidewall angles. In addition, this unit is designed to provide flexible process flexibility with a variety of process chemistries available, as well as process monitoring options to ensure defect free, repeatable performance. APPLIED MATERIALS Centura AP DPS offers intuitive software and advanced N2/O2/SF6 control, allowing the operator to understand the etches and switch chemistries easily. Centura AP DPS is equipped with a vacuum chamber designed for global RIE etching, as well as a low-temperature cryogenic degas feature for advanced metal etching. It also features a built-in slit pump capable of a wide range of pressures and vacuum levels, as well as a replaceable chamber for easy maintenance. The machine also includes multiple users to accommodate team members with different experience and processes. AMAT / APPLIED MATERIALS Centura AP DPS is CMOS-compatible and can produce line widths from 0.1 to 5µm, linear aspect ratio of up to 20:1, and feature depth control of up to 8µm. An integrated control tool consisting of a gas panel, power generator and rotor in-situ monitor allows for dynamic process control and precise adjustments. This asset is also equipped with an automated cleaning model that uses an integrated chemistry management equipment for efficient cleaning and an automated wafer handling system for serial run processes. With AMAT Centura AP DPS, users can expect ultra-clean and precise features with and without supports. This unit proves to be an excellent choice for those looking for an etch / asher for research and development, as well as sought-after production requirements.