Used AMAT / APPLIED MATERIALS Centura Avatar #9375621 for sale
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AMAT / APPLIED MATERIALS Centura Avatar is a highly advanced etcher and asher equipment used in semiconductor fabrication. It is designed to provide superior wafer uniformity and superior etch quality, enabling superior device performance. This system utilizes a single-chamber design to create precise patterning of plasma-etch and ashing with an integrated Plasma Source to provide optimal results. This Plasma Source produces a mix of ionized gases, which then react with the substrate's surface to modify its properties. The combined etch and ashing process produces very fine features down to 1 micron with high uniformity across the entire wafer. AMAT Centura Avatar is also fitted with a proprietary pattern generator circuitry that enables accurate pattern registration. This generator uses a combination of x-ray lithography and e-beam lithography to ensure precision in feature placement and alignment. It also allows for high throughput with fast etch and ashing rates and patterning precision over a wide range of temperatures. In addition, the Avatar has an integrated PerfectMatch chamber that improves etched surface quality and improves a wide range of semiconductor device performance metrics. This chamber features a tilting wafer loading unit, a rotating wafer carrier, and a pressure vessel that adjust to accommodate a wide range of wafer sizes. Finally, the Avatar includes built-in safety features such as a vacuum/leak detector machine and a nitrogen/argon injection to protect workers and the tool against plasma contamination. Various process vessels provide superior vacuum capabilities and power delivery, and all systems feature an automatic pressure-set profile to provide superior regulation of pressure during the etching process. APPLIED MATERIALS Centura Avatar is a powerful etching and ashing asset capable of producing high-quality features with extremely high accuracy and uniformity. Its advanced pattern generator, integrated PerfectMatch chamber, and sophisticated safety features make it the perfect choice for advanced semiconductor fabrication.
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