Used AMAT / APPLIED MATERIALS Centura DPS II 532 Metal #293624186 for sale
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ID: 293624186
Wafer Size: 12"
Vintage: 2006
Etcher, 12"
EFEM
Process: Metal
TM Module
(2) DPS 532 Chambers
Axiom chamber
AC Rack
2006 vintage.
AMAT Centura DPS II 532 is an advanced metal etcher / asher that is designed for the production of electronic components and other microelectronic devices. This etcher / asher provides a highly efficient and affordable way for customers to achieve optimal results with their materials, such as gold, aluminum, and copper. Its unique configuration allows for the use of masked, pre-sputtered, or bare substrates and also makes possible the etching of thick layers at high throughput rates. The etcher / asher utilizes a hot-wall microwave source to etch and plamirize thin conductive layers while minimizing process damage and achieving consistent uniformity. It features a 10 to 25 mTorr vacuum range, easy-to-use programmable controls, and a patented high-power switching control equipment. Additionally, it has been designed to be compatible with mass production processes and is able to work with a variety of materials, including gallium and indium. AMAT / APPLIED MATERIALS Centura DPS II 532 Metal etcher / asher boasts a number of advanced features, such as digital control electronics, high-power switching control system, and a digital power supply. This metal etcher / asher also offers fast processing speeds, enabling a throughput of up to 5 mL/min depending on the substrate thickness. It is also capable of operating in both linear and radial modes for maximum versatility. The Centura DPS II 532 is an extremely reliable etcher / asher that is capable of providing consistently high yields and results in the production of microelectronic components and devices. It is a robust, easy to use machine that is designed to provide a cost-effective solution with high reliability and excellent performance. It features an integrated vacuum unit, cooling machine and long lifetime with low maintenance costs. Overall, AMAT Centura DPS II 532 Metal etcher / asher is a powerful and versatile machine that is optimized for high throughput production of microelectronic devices and components. It is an advanced tool that is designed to provide optimal uniformity and accuracy while keeping the production costs low and maintaining an exceptionally long lifetime.
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