Used AMAT / APPLIED MATERIALS Centura DPS II AdvantEdge G5 Mesa #9286855 for sale
URL successfully copied!
Tap to zoom
AMAT AMAT / APPLIED MATERIALS Centura DPS II AdvantEdge G5 Mesa is a production-class equipment specializing in etch/ash processes. It is designed for high-yield and cost-effective manufacturing, as well as deep sub-micron geometries. The Centura DPS II features a state-of-the-art parallel dual-beam optics equipment that enables fast substrate heating and precise vertical and horizontal alignment for a precise etch/ash profile. Its optics system has a max substrate size of 6 inches by 6 inches, and utilizes a Class 1 laser. The unit utilizes multiple chambers for etch process optimization, while its in-line, direct-drive mass flow controllers help ensure precision process control and maximum reproducibility. The Centura DPS II is comprised of a plasma generator, RF power supply, ion source power supply, load lock, and substrate transfer components that can be configured to accommodate atmospheric, vacuum, or cryogenic processing. Its process control model is also programmable to allow for real-time optimization of the plasma chemistry and residence times, allowing for precise and repeatable etching/ashing results. The DPS II is powered by the control software, ADVANTEdge Control Software which a complete and real-time monitoring of the equipment with the ability to auto-tune to maintain optimum etch performance. It also features pre-programmed recipes optimized for etch/ash, allowing for easy processing, with a library of process recipes that operators can store and access. The machine is designed to be an effective, powerful, and reliable etcher/asher, offering the highest levels of etch uniformity with superb process repeatability. The DPS II is usable for both prototype and production-level applications, and is ideal for the production of high-end IC's and RF components.
There are no reviews yet