Used AMAT / APPLIED MATERIALS Centura DPS Metal #9276067 for sale
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ID: 9276067
Metal etcher, 8"
C1P1
WBLL
Orient
CD
(2) DPS R0
(2) ASP
AC Rack
Generator rack
Missing parts:
VME Board
Process kit
1996 vintage.
AMAT / APPLIED MATERIALS Centura DPS Metal etcher/asher is a highly advanced equipment for detailed, reliable, and precise micromachining of metals. This system combines the capability to etch and asher metals with the required power to produce high precision, high accuracy, and high productivity. This unit is able to etch and asher metal features with dimensions ranging from 2um to 20um in size. AMAT Centura DPS Metal machine utilizes an environmentally friendly, single side processing, in-line plasma source for dry etching and RIE ashing of metal surfaces. In this tool, a low-frequency power source is used to sustain a plasma environment for etching or ashing processes. This process can be used to create features ranging from 2um to 20um in size using positive or negative photoresist materials. The metal is heated to oxidation temperature, at which point oxygen is introduced to the substrate, creating metal oxide. The metal oxide is subsequently ablated via etching and ashing processes, which are tailored to each specific product. The process parameters, such as chamber pressure, gas chemistries, RF power, and plasma generation, are monitored to ensure consistency. The process can be used on a variety of metal films, such as copper, nickel, gold, aluminum, and more. The asset includes a variety of additional features to ensure process stability and reliability. These features include advanced contamination control technologies, clean-in-place systems, and an integrated automation model. The equipment can also be integrated with additional peripheral systems, such as a post-process cleaning system and a laser alignment station, for optimal performance. The unit is designed to meet customer needs for repeatability and process control. APPLIED MATERIALS Centura DPS Metal etcher/asher is an ideal machine for applications such as lithography, thin films, micro-fabrication, 3D printing, MEMS, and more. With its high accuracy, efficiency, repeatability, and reliable processes, the tool ensures that metal parts meet the high requirements for these applications. AMAT has made sure that Centura DPS Metal asset meets customer demands and facilitates the production of high-performance metal devices and parts.
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