Used AMAT / APPLIED MATERIALS Centura DPS Metal #9277563 for sale
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ID: 9277563
Wafer Size: 8"
Metal etcher, 8"
(2) DPS R0 Metal chambers
(2) ASP Chambers
AC Controller rack
RF Rack
(2) AMAT / APPLIED MATERIALS Chillers
NESLAB 150 Chiller
(2) DTCU
Load locks: Wide body LL
Frame: Ph1
HP Robots
Orientor chambers
EDWARD IQDP Pumps
Chuck type: PI ESC
Signal tower
Hard Disk Drive (HDD)
Gas configuration:
DPS: BCl3, Cl2, N2, CF4
ASP: H2O, CF4, N2, O2.
AMAT / APPLIED MATERIALS Centura DPS Metal is an etcher / asher, a state of the art machine designed for processing materials in the semiconductor and microelectronics fabrication industry. Its small size and superior performance make it a popular choice among chip manufacturers. AMAT Centura DPS Metal is capable of precise patterning, cleaning, drying, and etching on a wide variety of materials. APPLIED MATERIALS Centura DPS Metal is designed for high-precision applications. It utilizes a multi zone equipment that provides precise flow distribution and temperature control, allowing for uniform etching and ashing across various substrates. The system is designed with advanced motion control, ensuring consistent and accurate layer formation. The unit is also equipped with a capacitively coupled RF (CCRF) source for improved process control, increased throughput, and higher accuracy. Centura DPS Metal also features advanced cleaning and drying capabilities. The machine is designed to flush away solid residues, such as particles, metals, etc. with a variety of cleaning solutions. It also offers advanced drying capabilities, allowing for rapid and uniform removal of liquid residues. This ensures optimal substrate performance and product quality. AMAT / APPLIED MATERIALS Centura DPS Metal is equipped with an automated Wafer Handler that supports the loading and unloading of up to four wafers. This tool can provide connectivity to top and bottom load fixtures to allow for better workflow. The asset is also designed to reduce pollution by minimizing the generation of mists and vapors. Additionally, the model is designed to reduce the risk of contamination during processing by using encapsulated components and corrosion-resistant materials. AMAT Centura DPS Metal is designed to provide improved accuracy and repeatability of processes at a low cost. Its high performance and superior features make it a reliable and cost-effective choice for the semiconductor and microelectronics manufacturing industry.
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