Used AMAT / APPLIED MATERIALS Centura DPS2 #293821388 for sale

ID: 293821388
Vintage: 2008
Etcher 2008 vintage.
AMAT / APPLIED MATERIALS Centura DPS2 is a highly advanced etcher/ asher equipment designed for precision plasma processing in the semiconductor manufacturing industry. This tool is a part of the Centura platform, which is renowned for its flexibility, reliability, and process performance in the production of advanced microelectronic devices. AMAT Centura DPS2 is equipped with cutting-edge technologies and features that enable it to perform a wide range of plasma-based processes, including etching, ashing, and stripping of materials on semiconductor wafers. Its versatile capabilities make it suitable for a variety of applications, such as advanced logic, memory, and foundry processes. The system is specifically designed to meet the stringent requirements of the semiconductor industry for high process uniformity, repeatability, and productivity. One of the key highlights of APPLIED MATERIALS CENTURA DPS 2 is its dual-process chamber configuration, which allows for simultaneous processing of two wafers in independent chambers. This parallel processing capability significantly increases the unit throughput and efficiency, making it ideal for high-volume manufacturing environments. The machine can also operate in a single-chamber mode for smaller batch processing or process development. Centura DPS2 features a highly customizable gas delivery tool that enables precise control over the process chemistry and ion energy distribution. This asset is crucial for achieving optimal process results and ensuring the quality and reliability of the processed wafers. The tool is equipped with advanced gas flow control technology, multi-zone temperature control, and automated pressure control mechanisms to ensure consistent process performance across all wafers. In terms of plasma sources, AMAT / APPLIED MATERIALS CENTURA DPS 2 is typically configured with high-density plasma sources, such as inductively coupled plasma (ICP) sources or microwave plasma sources. These sources generate highly reactive species that are critical for efficient etching and ashing of various materials on the wafer surface. The model also features advanced RF bias capabilities for controlling the ion energy and directionality during processing, which is essential for achieving precise material removal profiles and sidewall profiles. AMAT CENTURA DPS 2 is equipped with a state-of-the-art process monitoring and control equipment that enables real-time monitoring of key process parameters, such as plasma chemistry, temperature, pressure, and endpoint detection. This system allows for active process optimization and recipe tuning to ensure consistent and repeatable process results. Additionally, the tool is integrated with advanced automation and software control features for seamless recipe management, data analysis, and remote monitoring capabilities. Overall, CENTURA DPS 2 is a versatile and reliable etcher/ asher unit that delivers high process performance, flexibility, and productivity for advanced semiconductor manufacturing applications. Its advanced features, dual-process chamber configuration, customizable gas delivery machine, and precise process control capabilities make it an indispensable tool for meeting the evolving challenges of the semiconductor industry and driving innovation in microelectronics production.
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