Used AMAT / APPLIED MATERIALS Centura DPS2 #9384036 for sale

ID: 9384036
Wafer Size: 12"
Poly etcher, 12".
AMAT AMAT / APPLIED MATERIALS Centura DPS2 is an advanced etcher/asher for high productivity high performance wafer processing. It is designed to be a "workhorse" for production environments, allowing rapid throughput, accurate process control, and excellent uniformity, as well as the flexibility to be configured to meet specific customer needs. The DPS2 utilizes a high-throughput Pulsed Corona Discharge (PCD) Etch/Asher Equipment with an ultra-short pulse feature for greater process flexibility. It also includes a high speed profile controller, providing a wide range of etch profiles, along with a standard load-lock scheme capability, making the system ideal for etching and ashing of a variety of wafer materials. The unit runs in one of two run modes, the first being a fixed etch time mode where the processing time is set and the same load will be processed in that time regardless of the actual load size. The second mode is a controlled profile mode, where the time is adjusted based on the etch profile taken from the wafer being processed. Adjustments are made for different materials and recipe settings. The DPS2 utilizes an advanced rotating shield to achieve uniformity in the etching process, reducing the variability in etch rate on the edges of wafers and in the corners of dice. This results in less yield loss and better wafer quality. The machine's high throughput and flexibility makes it a perfect choice for large volume, high accuracy etching and ashing needs. It is also well suited for a variety of research and development projects where precise wafer processing is essential. The high temperature vacuum of the DPS2 also makes it ideal for applications that involve high temperature treatments of the wafers. The DPS2 offers a wide range of integrated diagnostics and monitor features to ensure reliable operation and to optimize yields. An advanced graphical user interface (GUI) also makes the tool extremely easy to control and monitor. Technical support and process engineering is also available for customers. AMAT Centura DPS2 is a reliable and high performing wafer processing workhorse ideal for production environments.
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