Used AMAT / APPLIED MATERIALS Centura DPS2 #9384037 for sale

AMAT / APPLIED MATERIALS Centura DPS2 is a high-precision plasma etcher/asher for semiconductor and flat panel display applications. The etcher utilizes high-peak power plasma sources and a patented dielectric plate to achieve extremely accurate etching and ashing results. The results are highly repeatable, with a maximum variation of 5 percent in etch rate from wafer to wafer. AMAT Centura DPS2 is well-suited for a wide range of IC and FPD applications, such as creating channels, contacts, and box shapes. The etcher's precise and repeatable results make it ideal for delicate structures. The maximum wafer size for the DPS2 is 200mm, and the chamber size can hold up to twelve substrates. The DPS2 offers multiple features to ensure accurate etching and ashing. The etcher is equipped with both capacitively coupled and high frequency inductively coupled plasma sources, allowing for a wide range of plasma densities and etch rates. The patented dielectric plate is used to provide shielding to the plasma from the walls of the etcher, ensuring a uniform etch across the wafer. Additionally, the unique design of the plate prevents dielectric sputtering, which would otherwise cause contamination of the wafer. The DPS2 also provides temperature control and uniformity throughout the etching process. The temperature of the etcher can be set up to 600 °C, allowing for accurate annealing and oxidation operations. The system also features a compact recirculating cooling system, keeping temperatures throughout the etcher uniform and within range of the target setting. The DPS2 introduces additional advantages through embedded automation capabilities. In addition to setting and monitoring the etching process, the included software provides user-defined, parameter-based recipe development and real-time process monitoring. The software enables the easy addition of process steps and custom recipes, allowing for efficient and precise etching. Overall, APPLIED MATERIALS Centura DPS2 is a high-precision etcher and asher designed for advanced semiconductor and FPD applications. Its unique combination of features, including two plasma sources, dielectric plate, temperature control, uniformity, and automation capabilities, make it the ideal etching solution for a wide range of devices.