Used AMAT / APPLIED MATERIALS Centura DT Hart #293624197 for sale
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ID: 293624197
Wafer Size: 12"
Vintage: 2002
Oxide etcher, 12"
EFEM
TM Module
(3) DT Hart
AC Rack
Chiller
2002 vintage.
AMAT / APPLIED MATERIALS Centura DT Hart is an advanced etcher / asher. This advanced tool has powerful capabilities to etch and asher wafers in a reliable, repeatable, and consistent process. It supports a wide range of etch chemistries and applications, with excellent temperature control, process precision, and low operating costs. AMAT Centura DT Hart features an industrial grade 6-inch quartz etching chamber with a hydrogen peroxide and argon gas mixture, which provides excellent etch uniformity and reliable operations. On top of this, a digital programmable logic controller is used to precisely control the process parameters, including chamber temperature and pressure. As well, the tool is designed around an efficient, three-zone heating equipment which reduces heat up time and cost associated with temperature cycling. This system also simplifies the ashing/etching process by allowing for precise temperature control for both the etching and ashing of wafers. APPLIED MATERIALS Centura DT Hart is a highly efficient, cost effective tool and is suitable for both commercial and R&D applications. It has a powerful, automated process control unit that is capable of delivering high quality wafers with low defect levels. The machine also ensures reliable process control, with repeatable and consistent etching results. In addition, the tool is equipped with a comprehensive set of analytical components, such as multi-mode mass spectrometry, solid phase microextraction, and automated particle flux control, allowing for accurate and precise measurement of etch chemicals, chamber conditions, and wafer quality. Overall, Centura DT Hart is a versatile tool that provides efficient and reliable ashing and etching for a variety of applications. With its advanced temperature control and process precision, it is perfect for both R&D as well as commercial production applications.
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