Used AMAT / APPLIED MATERIALS Centura Enabler E5 #293608974 for sale
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ID: 293608974
Vintage: 2008
Etcher
EFEM
MF
AC Rack
Generator Rack
(3) Chambers
2008 vintage.
AMAT / APPLIED MATERIALS Centura Enabler E5 etcher/asher is a single-station equipment designed to deliver advanced etching and ashing processes for high-volume production needs. Based on AMAT proprietary etch and ashing technology, its single chamber can provide quick turnaround and increased throughput, resulting in improved production yields. AMAT Centura Enabler E5 is a load-locked system that can perform a variety of etching and ashing processes in a controlled low-pressure environment. It is equipped with an 200mm Advanced Process Module (APM) and features an optimized process recipe library that is suitable for semiconductor and optoelectronic device manufacturing. It also supports high-productivity multistep processes with high-precision temperature, pressure and gas flow control. The unit's chamber utilizes APPLIED MATERIALS patented Power Processing Technology (PPT) to precisely etch and ashing of silicates, polysilicon, organics, nitride, poly-metal, and other hard-to-remove materials. It is powered by the Centura Controller, which provides users with a highly automated, intuitive, and cost-effective operating platform. The platform makes adjustments and optimizes the etch and ashing processes automatically to ensure the highest product quality and reliability. APPLIED MATERIALS Centura Enabler E5 also features an industry-leading precision process endpoint control logic that automatically adjusts process parameters, which eliminates the need for manual adjustments. This ensures that chemical reactions are accurately timed and optimal etch product profiles are achieved. The machine also features a safe and efficient environment and an integrated ParticleScanner particle removal technology that helps reduce particle-induced product scrap. Centura Enabler E5 offers an effective toolset and extensive process experience for advanced etch and ashing processes. Its advanced technologies and automated processes enable users to achieve higher production yields and lower costs. AMAT / APPLIED MATERIALS Centura Enabler E5 is a highly reliable, cost-effective platform that can help semiconductor and optoelectronic device manufacturers meet their production needs.
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