Used AMAT / APPLIED MATERIALS DPS 532 #293821494 for sale

AMAT / APPLIED MATERIALS DPS 532 etcher/asher equipment is a tool used in the semiconductor industry for the etching and ashing of dielectric structures used in the fabrication of ultra thin films. It is designed for use in the fabrication of ultra thin films such as tri-level dielectrics, metal gates, dual damascene copper metallization and high aspect ratio dual damascene processes. The system utilizes a number of technologies including volatile organic compound (VOC) reactive ion etching (RIE), wet etching and ultra high vacuum dry (UHV-Dry) etching to perform its unique processes. AMAT DPS 532 is an advanced, variable-flux etching unit that includes advanced plasma sources that can provide superior etch uniformity and etch rate. The machine also features an on-line monitoring tool, allowing for quick adaptation and real time control of the etching process. APPLIED MATERIALS DPS 532 utilizes a variety of etch gases, including NF3, CF4, O2, SF6, CHF3, C2F6, H2 and Ar, as well as other gases to achieve optimal etching performance. The asset also includes an advanced remote etching model, which enables process control and rapid recipe development and handling. The high vacuum and monitored dry etching technology incorporated in DPS 532 enables it to achieve high resolution features, improved critical dimension (CD) control, reduced micropiping, and high aspect ratios for ultra-thin films. Multiple modules can be integrated in the module allowing for a variety of process capabilities such as gap fill, defect passivation, critical patterning processes and metal gate etching. AMAT / APPLIED MATERIALS DPS 532 equipment is designed for integration into existing etching and ashing manufacturing lines. It incorporates common programmable logic controllers (PLCs) and servo-controls which provide easy integration into existing automation processes and decreases setup time when implementing the system into a production line. AMAT DPS 532 uses electroless mounting to mount the wafers, so the unit does not require extra manual intervention than other systems do. The machine also provides a wafer-level detection tool to prevent wafer damage due to incorrect loading or handling of the wafer. APPLIED MATERIALS DPS 532 etcher / asher asset is an advanced tool used in the semiconductor industry to create ultra thin films with precise etching control. The model utilizes a number of technologies including VOC-RIE, wet etching and UHV-dry etching techniques to achieve its unique processes. It is equipped with a monitoring equipment and programmable logic controllers, allowing it to be integrated into existing etching and ashing production lines. The high vacuum and monitored dry etching coupled with the wafer-level detection system enable it to achieve superior etch uniformity and rate with reduced micropiping and high aspect ratios with improved CD control.