Used AMAT / APPLIED MATERIALS DPS 532 #9093405 for sale

AMAT / APPLIED MATERIALS DPS 532
ID: 9093405
Wafer Size: 12"
Vintage: 2004
Metal etcher, 12", 2004 vintage.
AMAT / APPLIED MATERIALS DPS 532 is an asher/etcher developed for the fabrication of thin film microelectronic components. This model is specifically designed to provide excellent etching characteristics and speed, perfect for any microelectronics applications. AMAT DPS 532 is a stand-alone etcher/asher equipment and comes with a number of features that make it extremely powerful and efficient. It is equipped with a three-Torr pressure controller that can accurately regulate pressure range from atmosphere to 5 mTorr range. A gas box mounted on the main body provides continuous supply of high-quality process gases and carrier gases. Each gas box is equipped with standard connections and valves for gas lines, reducing the setup time and eliminating potential errors. Additionally, the gas flow controllers installed within the cabinet provide seamless and accurate control of gas composition during etching and ashing processes, allowing for independent adjustment of etch and ashing gas flow rates. APPLIED MATERIALS DPS 532 provides exceptional etch quality with its Tunable Inductively Coupled Plasma source. This source provides maximum consistency with wafer matching parameters such as bias, wafer temperature, and gas composition during etching. The system also offers the highest possible etch rate, providing greater productivity in etching process. DPS 532 has advanced safety features that make it both safe and user-friendly. The model has an on-screen safety checklist that must be completed before the etch process begins, reminding users of important safety steps, such as preparation and post-etch clean-up. The unit also has extremely low Ozone Concentration detection, making the machine safe to operate and compliant to EPA regulations. Overall, AMAT / APPLIED MATERIALS DPS 532 is an ideal choice for any etching application, combining excellent etch quality, speed, safety, and reliability into one convenient piece of equipment. It is a cost-effective and reliable tool, perfect for any microelectronics application.
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