Used AMAT / APPLIED MATERIALS DPS II #9103057 for sale
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ID: 9103057
Wafer Size: 12"
Vintage: 2008
Metal etcher, 12"
(3) Chambers
(2) Axiom chambers
2008 vintage.
AMAT / APPLIED MATERIALS DPS II Asher is an advanced plasma etching and cleaning equipment designed for R&D and production applications. It combines high-performance dry etching capabilities, excellent particle removal, low-temperature cleaning, and fast ramp-down times. The system provides superior accuracy and repeatability for etching process optimization. AMAT DPS II Asher features a vacuum chamber with a heating element for warm, low-pressure cleaning or etching and etch processes. It also includes a rotating table to allow product to be placed on the transfer stages for etching. An advanced process controller monitors the process parameters while an LCD user interface helps operators maneuver through the procedure. The plasma etching process is driven by a high-frequency generator that uses an RF plasma source for creating and controlling the plasma field. An integrated emission unit is then used to control the plasma from the etch chamber and to provide and maintain chamber conditions. The chamber also features a high-resolution digital multimeter and a digital thruster to ensure accurate etch process control. The process controller is equipped with real-time feedback data to ensure accurate and precise etching. It can be linked to an external PC for remote control of the process. The machine also features a closed-loop temperature control tool that locks in etch process temperature and a high-performance temperature control asset to ensure that the temperature of the asher is always maintained. Additionally, the etch process can be monitored with a variety of diagnostics such as optical emission spectroscopy, mass spectroscopy, and other process parameters. The model is capable of cleaning particles from the etch surface, reducing particle contamination. It also allows for easy access to the vacuum chamber for quick maintenance and repair. The key benefits of APPLIED MATERIALS DPS II Asher include high repeatability, value, and performance for etching, cleaning and other applications. It offers superior accuracy and repeatability, minimized particle contamination, fast ramp-down times, and excellent cleanliness of the etch surface. The equipment is also easy to use, efficient, and cost-effective.
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